15%DC-550/101白色担体填充柱应用安捷伦测定三氯氢硅

15%DC-550/101白色担体填充柱应用安捷伦测定三氯氢硅

15%DC-550/101白色担体填充柱应用安捷伦测定三氯氢硅 详细信息：

在硅外延工艺中，三氯氢硅的纯度和质量直接影响外延层的质量和性能。因此，对硅外延用三氯氢硅进行严格的检测是que保硅片质量的guan键。

浩瀚色谱（山东）应用技术开发有限公司，15%DC-550/101白色担体填充柱在气相色谱法测定三氯氢硅含量中,采用分子直径法,以四氯化硅为标准物,计算氯hua氢,二氯二氢硅,三氯氢硅在热导检测器上的相对校正因子,并以氦气为载气,测定三氯氢硅对四氯化硅的相对质量校正因子.未采用分子直径法得到的相对质量校正因子为0.891,采用分子直径法得到的相对质量校正因子为0.915,两者相对误差为1.13%.

名称：15%DC-550/101白色担体填充柱

规格：3m*1/8，60-80目

zui高使用温度：240°C

应用：工业三氯氢硅的测定

适用于：

安捷伦490在线/便携，4890,5890,6890,7820,7890,8860,8890

岛津GC-14C，GC-2010，GC-2014，GC-2030

赛默飞1310,1300,1610,1600

瓦里安3800系列

布鲁克PE580,590,680,690

磐诺A90，福立GC9790，华爱，天瑞，天美，GC7900，川仪，北分瑞利，东西电子，鲁南瑞虹，捷岛/科晓

15%DC-550/101白色担体填充柱应用安捷伦测定三氯氢硅  图片：

15% DC-550/101 white support packed column application Agilent determination of trichlorosilane

15% DC-550/101 white support packed column application Agilent determination of trichlorosilane detailed information:

In the silicon epitaxial process, the purity and quality of trichlorosilane directly affect the quality and performance of the epitaxial layer. Therefore, strict testing of trichlorosilane for silicon epitaxy is crucial for ensuring the quality of silicon wafers.

Haohan Chromatography (Shandong) Application Technology Development Co., Ltd. used a 15% DC-550/101 white support packed column in gas chromatography to determine the content of trichlorosilane. The molecular diameter method was used, and silicon tetrachloride was used as the standard substance to calculate the relative correction factors of chlorinated hydrogen, dichlorosilane, and trichlorosilane on a thermal conductivity detector. Helium gas was used as the carrier gas to determine the relative mass correction factor of trichlorosilane to silicon tetrachloride The relative mass correction factor obtained without using the molecular diameter method is 0.891, while the relative mass correction factor obtained using the molecular diameter method is 0.915, with a relative error of 1.13%

Name: 15% DC-550/101 white support filling column

Specification: 3m * 1/8, 60-80 mesh

Maximum operating temperature: 240 ° C

Application: Determination of industrial trichlorosilane

Applicable to:

Agilent 490 online/portable, 48905890689088608890

Shimadzu GC-14C, GC-2010, GC-2014, GC-2030

Thermo Fisher Scientific 1310130016101600

Varian 3800 Series

Brooke PE580590680690

Panno A90, Fuli GC9790, Huaai, Tianrui, Tianmei, GC7900， Chuanyi, Beifen Ruili, Dongxi Electronics, Lunan Ruihong, Jiedao/Kexiao

15% DC-550/101 white support packed column application Agilent determination of trichlorosilane image: