TMC STACIS IIIc主动隔振系统

TMC STACIS IIIc主动隔振系统

STACIS IIIc is a compact version of our STACIS III active piezoelectric vibration cancellation system. It offers the same outstanding vibration isolation performance at a reduced height.

STACIS IIIc is ideal in situations where there is no, or very low, raised floor, where the height of the standard STACIS III system would make the instrument too tall.

In a 3-isolator configuration isolator height is less than 60% of the regular STACIS III height. In systems with more than 3 isolators the height will be between 60 and 70% depending on payload setup. See specifications below for details.

TMC STACIS IIIc主动隔振系统优点：

Up to 42% reduction in isolator height, compared to the regular STACIS III system with no reduction in performance.

Hundreds of times stiffer than air isolators, STACIS suffers from none of the limitations of air vibration isolation systems. There is no "soft" suspension and, unlike active air systems, STACIS can be placed beneath a tool with an internal active air isolation system with both systems fully optimized.

The unique serial design and proprietary high-force piezoelectric technology 
results in a wide active bandwidth from 0.6 Hz to 150 Hz and unmatched, truly active vibration isolation with 90% vibration reduction starting at 2 Hz.

TMC STACIS IIIc主动隔振系统 性能

4500 lbs (2045 kg) payload tested with simulated vibration at VC-C (500 μin./s, 12.5 μm/s RMS)

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