Interferometer System for Multiple Surface Testing
Verifire MST laser interferometer enables precise optical metrology of multiple surfaces simultaneously, including plane parallel components with multiple reflections.
The Verifire MST starts with the classical interferometer applications.
These applications all measure the wavefront variations between two surfaces, a two-surface cavity.
However, measuring an uncoated parallel plate gives two layered interferograms (a three-surface cavity) that confuse standard Phase Shift Interferometry algorithms.
ZYGO has solved this problem using wavelength shifting of phase, and ZYGO's patented Fourier Transform Phase Shifting Interferometry (FTPSI).
The Verifire MST can measure two-surface, three- and even four-surface cavities.
Show all of the surfaces, or only the surfaces of interest, all within ZYGO's Mx software. Artifacts are naturally suppressed using FTPSI, eliminating the need for an extended source.