NanoCalc 反射膜厚测量系统
产品报价:询价
更新时间:2012/6/1 11:29:29
产地:上海
品牌:海洋光学
型号:NanoCalc
厂商性质: 生产型,贸易型,
公司名称: 上海玻色智能科技有限公司
顾先生 : () (021-33530928)
(联系我时,请说明是在来宝网上看到的,谢谢!)产品报价:询价
更新时间:2012/6/1 11:29:29
产地:上海
品牌:海洋光学
型号:NanoCalc
厂商性质: 生产型,贸易型,
公司名称: 上海玻色智能科技有限公司
顾先生 : () (021-33530928)
(联系我时,请说明是在来宝网上看到的,谢谢!)薛先生 13817727148 xuekq@bosontech.com.cn
http://www.bosontech.com.cn/Products/nanocalc.html
薄膜的光学特性主要有反射和干涉。NanoCalc薄膜反射测量系统可以用来进行10nm -250um的膜厚分析测量,对单层膜的分辨率为0.1nm。根据测量软件的不同,在1秒钟内可以分析单层或最多达到10层的膜厚。
产品特点
可分析单层或多层薄膜;
分辨率达0.1nm;
适合于在线监测;
使用原理
最常用的两种测量薄膜的特性的方法为光学反射和投射测量、椭圆光度法测量。NanoCalc利用反射原理,通过测量宽光谱范围内的反射率曲线来进行膜厚测量。
查找n和k值
可以进行多达十层的薄膜测量,薄膜和基体材质可以是金属、电介质、无定形材料或硅晶等。NanoCalc软件包含了大多数材料的n和k值数据库,用户也可以自己添加和编辑。
应用
NanoCalc薄膜反射材料系统适合于在线膜厚测量,包括氧化层、中氮化硅薄膜、感光胶片及其它类型的薄膜。NanoCalc也可测量在钢、铝、铜、陶瓷、塑料等物质上的抗反射涂层、抗磨涂层等。
NanoCalc Systems Available
NANOCALC-2000-UV-VIS-NIR
Wavelength:
250-1100 nm
Thickness:
10 nm-70 um
Light source:
Deuterium and Tungsten Halogen
NANOCALC-2000-UV-VIS
Wavelength:
250-850 nm
Thickness:
10 nm-20 um
Light source:
Deuterium and Tungsten Halogen
NANOCALC-2000-VIS-NIR
Wavelength:
400-1100 nm
Thickness:
20 nm-10 um (optional 1 um-250 um)
Light source:
Tungsten Halogen
NANOCALC-2000-VIS
Wavelength:
400-850 nm
Thickness:
50 nm-20 um
Light source:
Tungsten Halogen
NANOCALC-2000-NIR
Wavelength:
650-1100 nm
Thickness:
70 nm-70 um
Light source:
Tungsten Halogen
NANOCALC-2000-NIR-HR
Wavelength:
650-1100 nm
Thickness:
70 nm-70 um
Light source:
Tungsten Halogen
NANOCALC-2000-512-NIR
Wavelength:
900-1700 nm
Thickness:
50 nm-200 um
Light source:
High-power Tungsten Halogen
For Reflectometry applications, the following items are required:
NC-2UV-VIS100-2
Bifurcated UV fiber
400 um x 2m
2x SMA connectors
Flexible metal jacketing
NC-STATE
Single point reflection measurement for non transparent samples
Step-Wafer 5 Steps 0-500 mm, calibrated 4"
If using a microscope, the following items are also needed:
NC-7UV-VIS200-2
Reflection probe for application microscopy with MFA-C-Mount
Step-Wafer 5 Steps 0-500 mm, calibrated 4"
NanoCalc Specifications
Angle of incidence:
90°
Number of layers:
3 or fewer
Reference measurement needed:
Yes (bare substrate)
Transparent materials:
Yes
Transmission mode:
Yes
Rough materials:
Yes
Measurement speed:
100 milliseconds to 1 second
On-line possibilities:
Yes
Mechanical tolerance (height):
With new reference or collimation (74-UV)
Mechanical tolerance (angle):
Yes, with new reference
Microspot option:
Yes, with microscope
Vision option:
Yes, with microscope
Mapping option:
6" and 12" XYZ mapping tables
Vacuum possibilities:
Yes