Electron microscopies are a driving force in the nanotechnological revolution that we find ourselves in today. Atomic force microscopy along with scanning tunneling microscopy is another enabling technology in the growing field of nanotechnology. These two worlds, although highly complimentary, have generally been separate and apart. For the first time ever, Nanonics Imaging Ltd. in its drive for integrated microscopic solutions has now been able to fully and transparently integrate these two worlds.

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• Simultaneous and Independent SPM/SEM Imaging
• Transparent integration with any SEM or FIB with a sufficiently large sample chamber
• Normal Force Sensing: Contact, Non-Contact, and Intermittent Contact Modes in SPM
• High resolution Cathodoluminescence measurement
  
  

  Complimentary Techniques of SEM and AFM The Scanning Electron Microscope has difficulty obtaining information on a variety of samples. One such situation is the case of a trench in a semiconductor wafer in which a SEM cannot view the bottom or the sidewall of the trench structure. Using the unique AFM capabilities of the MultiView 400™ The operator of a SEM or FIB machine can ask, on line, questions about high aspect ratio structures (eg. side wall angles and the surface structure of these sidewall in a variety of important devices with vias and other structures.		SEM image of a Nanonics AFM Probe in contact with sample
  Imaging a deep trench such as the one opposite is impossible with standard silicon AFM tips. The Nanonics deep trench probes together with the large scan range of the 3D FlatScan ™ makes these images possible for the first time.		10 x 10 micron AFM image of a 10 micron deep/2 micron wide trench (Z-range 10 micron)
  The bottom of a deep trench
  Nanonics deep trench probes make it possible to form images from the bottom of a deep trench of up to 1.5mm.		1 x 1 micron AFM image of the bottom of the deep trench (Z-range 100 nm)
  Side wall image
  Only the Nanonics 3D FlatScan ™ is able to scan in the X-Z plane to image features on the side of a deep trench		5 x 5 micron X-Z scan of the sidewall of the deep trench (Y-range 150 nm)