Denton Vacuum LLC, a leading global supplier of production scale thin film technology systems, today announced it has shipped and qualified two Integrity® e-beam evaporation systems for a major power semiconductor manufacturer based in North America.

Denton Vacuum Explorer Evaporation System. (PRNewsFoto/Denton Vacuum LLC)

Power semiconductors control and convert electricity in electronic systems; they are increasingly critical in industries such as renewable energy, automotive and aerospace. "Manufacturers are rapidly improving power semiconductor technology – simplifying design, for example, and amping up performance for high demand applications," says Rod Moore, Denton president and CEO, "To enable these advances, leading makers rely on Denton's manufacturing systems because they're ready to go, provide high up time and include exceptional technical support." Integrity systems meet unique power semiconductor production requirements including high wafer throughput, extremely uniform thick films and sophisticated controls that support fab-wide communication, precision recipe management and operator efficiency.

Integrity e-beam evaporation systems offer the industry's most comprehensive solutions for e-beam deposition, thickness control and ion-assisted evaporation. Denton's ProcessPro® controls platform delivers a number of essential capabilities including high speed factory communication, configurable operator and process engineering access, sophisticated data-logging, remote monitoring and access, and automatic e-mail alerts of system alarms. "Manufacturers stay competitive when their equipment suppliers deliver superior process stability managed by state-of-the-art factory controls," Moore notes. Denton installs Integrity systems worldwide to support production customers in the optics, aerospace, power semiconductor and compound semiconductor industries.